Series in Micro- and Nano-metrology
Series Editor: Richard Leach, University of Nottingham
About the Series
Working at the micro- and nano-scales demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. This series on micro- and and nano-metrology presents the latest advances in these techniques and is aimed at a broad range of scientists and engineers involved in nanotechnology and advanced manufacturing research. The series addresses new and emerging measurement and analysis technologies, and recent advances in standards and regulatory frameworks. Subject areas include, but are not limited to: traceability, uncertainty, calibration, verification and standards; precision instrumentation design and theory; optical instruments; scanning probe microscopies; particle beam microscopy; angle, displacement and coordinate metrology; surface topography measurement; analytical techniques; in-line measurement and control in micro- and nanotechnology and advanced manufacturing.
Subject areas include: traceability, uncertainty, calibration, verification and standards; precision instrumentation design and theory; optical instruments; scanning probe microscopies; particle beam microscopy; angle, displacement and coordinate metrology; surface topography measurement; analytical techniques; in-line measurement and control in micro- and nanotechnology and advanced manufacturing.
Series Editor
Richard Leach is a Professor of Metrology at the University of Nottingham and prior to this was at the National Physical Laboratory (1990 to 2014). His research themes include the measurement of surface topography, development of methods for measuring 3D structures for precision and additive manufacturing, development of methods for controlling surfaces to high resolution in industrial applications and x-ray computed tomography. He has particular interests in developing optical techniques. Richard is on the Council of the European Society of Precision Engineering and Nanotechnology, the Board of Directors of the American Society of Precision Engineering, the EPSRC Peer Review College, the International Committee on Measurements and Instrumentation and several international standards committees. He is the European Editor-in-Chief for Precision. He has over 280 publications including three textbooks. Richard is a Fellow of the Institute of Physics, the Institution of Engineering & Technology, the International Society of Nanomanufacturing, a Sustained Member of the American Society of Precision Engineering, a Chartered Engineer and a Chartered Physicist. Richard is a visiting professor at Loughborough University and the Harbin Institute of Technology.
