ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals
fem
finite-elements
piezo
finite-element-analysis
multiphysics
fea
silicon
mems
finite-element-methods
ansys
thin-film
piezoelectric
zno
piezo-sensor
pzt
piezoelectric-materials
piezoelectric-sensors
aln
silizium
vibrit
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Updated
Oct 7, 2024 - Roff